#Lam rainbow 4520 manual generator
The pressure was regulated by the pumping speed, the generator was matched to the plasma manually by the reflected power, the time of the process according to the stopwatch. The operator opened the etching chamber (round thing on the right), put the plate in there, pumped out the chamber, set gas flows and power, and started the process. The first installations had no automation. Source: Technical University Delft, The Netherlands. Since I worked for a long time as a process engineer in plasma chemical (dry) etching, I will illustrate the history of automation mainly with dry etching units.
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It is understandable, but how to move from a university facility with magnets on clay to a fully automatic factory? The dependence of the number of particles of 5 microns in the atmosphere of a clean room on the time during two days when working in one shift (Production of MEMS, ISO6 purity class).įrom the foregoing, it is clear that a person must be removed from semiconductor production - the less often he appears there, the higher the yield will be and, accordingly, the greater will be the profit from one plate. This is clearly seen on the graph of the dependence of the number of particles in the air on time - the beginning and end of the working day are clearly visible, outside of this time the number of particles drops to almost zero. Clearing the air is not a problem: HEPA filters do an excellent job, but keeping the air clean is no longer so simple and the main problem is the person who is the main source of particles in a clean room. To combat this problem, production was moved to clean rooms with filtered air. At the dawn of semiconductor production, it became clear that when they hit the plate, particles present in the atmosphere destroy devices and reduce the yield to almost zero.
The wrong plates, the wrong side, the wrong operation, the wrong recipe, mixed data, routes, masks, etc. What can we say about the usual production. As you know, in aviation, 60% of the causes of accidents are pilot errors, and there people are responsible and concentrated like nowhere else. No matter how responsible and focused the operator is, there will still be mistakes. And the production should always produce the same result, regardless of the operator. Of course, there are craftsmen with perfect coordination of movements that can shoe a flea, but firstly, there are not enough of them for a whole plant, secondly, they can also get sick, go on vacation, on maternity leave, etc. The operator puts the plate into the installation each time in different ways, with different force, somewhere presses, removes something in different ways, etc.
Inaccuracy and irreproducibility of movements, as in one operator, and from operator to operator.A person in semiconductor manufacturing has three main problems: In many cases, the expression "handmade" is synonymous with something expensive and of very high quality, but in semiconductor manufacturing, this is the worst thing that can happen to your products. Since the emergence of the semiconductor industry, it became clear that in the production process there is no place for man. Why are people in semiconductor manufacturing not needed? How and why this happened and what it led to - let's see.
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However, we already have a branch of industry in which full automation has occurred for a long time - the semiconductor industry. Someone begins to fear the loss of jobs, someone is experimenting with the unconditional basic income, many are wondering what all this will lead to. Supermarkets without cashiers appear, Mask tries to get robots to produce a sufficient number of cars a week, Swedes launch a robotic car production line, the Russian Post automates the delivery of correspondence using drones. Recently, automation and robotization is quite a popular topic.
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